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Spectral-Interference Wafer Thickness Meter
SI-F80R series
- Accurately Measure Wafer Thickness
- Not Influenced by Wafer Patterns
- Overcomes Historical Problems
Accurately Measure Wafer Thickness
The SI-F80R Series employs a near-infrared SLD that can penetrate through Si, GaAs, SiC, InP, a-Si, and other semiconductors. It can accurately measure wafer thickness, even when covered with BG (backgrind) tape.
Best in its Class Specifications
- Accurately Measure Wafer Thickness
- Not Influenced by Wafer Patterns
- Overcomes Historical Problems
- Downloads:
Downloads
For Your Support
Tips of Measurement
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