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Spectral-Interference Wafer Thickness Meter
SI-F80R series
- Accurately Measure Wafer Thickness
- Not Influenced by Wafer Patterns
- Overcomes Historical Problems
Not Influenced by Wafer Patterns
Variations from wafer surface patterns and measurement alarms can be held to a minimum by decreasing the beam spot diameter and surface aberrations inside the beam spot.
- Accurately Measure Wafer Thickness
- Not Influenced by Wafer Patterns
- Overcomes Historical Problems
- Downloads:
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