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          Spectral-Interference Wafer Thickness Meter

          SI-F80R series

          Not Influenced by Wafer Patterns

          Variations from wafer surface patterns and measurement alarms can be held to a minimum by decreasing the beam spot diameter and surface aberrations inside the beam spot.

          Patterned Si wafer thickness profile data

          Not Influenced by Wafer Patterns

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          Measurement Sensors