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          Spectral-Interference Wafer Thickness Meter

          SI-F80R series

          Accurately Measure Wafer Thickness

          The SI-F80R Series employs a near-infrared SLD that can penetrate through Si, GaAs, SiC, InP, a-Si, and other semiconductors. It can accurately measure wafer thickness, even when covered with BG (backgrind) tape.

          SI-F80R

          Accurately Measure Wafer Thickness

          Best in its Class Specifications

          Best in its Class Specifications

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          Measurement Sensors