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          Wide-Area 3D Measurement SystemVR series

          VR-5100

          Wide-Area 3D Measurement System Head

          SPECIFICATIONS

          Select Language

          Model

          VR-5100

          Type

          Head

          Controller

          VR-5000

          Field-of-view

          Low magnification (wide field of view)

          Magnification on a 15" monitor 12×

          Horizontal

          24.0 mm 0.94"

          Vertical

          18.0 mm 0.71"

          Magnification on a 15" monitor 25×

          Horizontal

          12.0 mm 0.47"

          Vertical

          9.0 mm 0.35"

          Magnification on a 15" monitor 38×

          Horizontal

          8.0 mm 0.31"

          Vertical

          6.0 mm 0.24"

          Magnification on a 15" monitor 50×

          Horizontal

          Vertical

          4.5 mm 0.18"

          High magnification (high resolution)

          Magnification on a 15" monitor 40×

          Horizontal

          7.6 mm 0.30"

          Vertical

          5.7 mm 0.22"

          Magnification on a 15" monitor 80×

          Horizontal

          3.8 mm 0.15"

          Vertical

          2.9 mm 0.11"

          Magnification on a 15" monitor 120×

          Horizontal

          2.5 mm 0.10"

          Vertical

          1.9 mm 0.07"

          Magnification on a 15" monitor 160×

          Horizontal

          Vertical

          1.4 mm 0.06"

          Zoom

          1× to 4×

          Height measurement

          Display resolution

          0.1 µm

          Height measurementrange

          Without Z stitching

          Low magnification (wide field of view) : 10 mm 0.39"
          High magnification (high resolution) : 1 mm 0.04"

          With Z stitching

          Low magnification (wide field of view) : 50 mm 1.97"
          High magnification (high resolution) : 30 mm 1.18"

          Repeatability (σ)

          Without Z stitching

          0.4 µm*1

          With Z stitching

          1.0 µm*1

          Measurement accuracy

          Without Z stitching

          ±2.5 µm*1

          With Z stitching

          ±4.0 µm*1

          Width measurement

          Repeatability (σ)

          Low magnification (wide field of view) : 1 µm
          High magnification (high resolution) : 0.5 µm
          *1

          Measurement accuracy

          Low magnification (wide field of view) : ±5 µm
          High magnification (high resolution) : ±2 µm
          *1

          Stitching function

          Manual measurement (XY manual operation + Z automatic control)*2

          XY measurable range

          92 x 86 mm 3.62" x 3.39"*2

          Stage

          XY stroke

          70 x 70 mm 2.76" x 2.76" (manual)

          Z stroke

          73 mm 2.87" (motorized)

          Load capacity

          4.5 kg

          Working distance

          75 mm 2.95"

          Image receiving element

          4 megapixel monochrome CMOS

          Transmitter lens

          Double-telecentric lens x 2

          Receiver lens

          Double-telecentric lens

          Light sources

          Observation light source

          LED ring light (red, blue, green)

          Measurement light source

          White LED

          Data processing

          Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)

          Power supply

          Power voltage

          100 to 240 VAC, 50/60 Hz

          Power consumption

          200 VA max.

          Environmental resistance

          Ambient temperature for usage

          +15 to 30 °C 59 to 86 °F

          Ambient humidity for usage

          35 to 80 % RH (no condensation)

          Weight

          Approx. 25 kg*3

          *1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23±1 °C 73.4±1.8 °F)
          *2 Measurement expansion module (VR-H3J) required
          *3 Weight of only measurement unit: Approx. 11 kg

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