Types of Measurements Systems3D Interference Measurement Sensor
Highly-Accurate Measurements are acquired with white light interferometry
The light emitted from the light source is split in two by the beam splitter. One beam reflects off the target and the other reflects off the reference mirror. Both beams then strike the light-receiving element as interfering light waves. These interfering light waves provide the highest level of interference when the lengths of their optical paths coincide. The optical unit, which incorporates all the optical components, moves up and down to obtain contrasting images. For each measurement point in these images, the device reads the position of the optical unit at the highest level of interference. This information is then used to determine the distance to the target.