Microscopes & 3D Measurement Systems

Advanced systems for observation, imaging, and measurement.

Lineup

VHX-X1 series - Digital Microscope

This product is equipped not only with a 4K CMOS image sensor that delivers highest-in-class resolution and a 4K-compatible lens but also with a deep contrast function that allows for clear observation of subtle surface conditions that were not visible until now. The full control system allows all users to perform intuitive operations. This brand-new microscope system supports a wide range of analysis work with diverse customizable features including the appearance checker (which automatically identifies differences in an instant); the large, 300 mm stage (which boasts an analysis range nine times that of conventional systems); and the lens revolver (which is equipped with high-resolution lenses compatible with metallurgical microscopes).

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VL-700 series - 3D Scanner CMM

The VL-700 Series 3D Scanner CMM is equipped with the world’s first fully automatic CAD conversion function. From scanning to STEP file output, this scanner handles everything automatically. There is no need to go through specialized conversion software to obtain data in a format accessible by CAD software, which eliminates these steps from the work procedure. Furthermore, the newly developed high-resolution transmitter and receiver lenses and WDR (Wide Dynamic Range) CMOS sensor offer twice the detection ability of conventional models. True-to-life scanning makes it possible to obtain accurate 3D data with shape and color information. Using the comparison fitting algorithm, CAD data and coordinates can be used to perform comparative measurements.

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VR-6000 series - 3D Optical Profilometer

The VR-6000 Optical Profilometer performs non-contact measurement to replace stylus profilometers and roughness meters. This 3D profile system captures full surface data across the target with a resolution of 0.1 μm, enabling measurement of features that cannot be performed with probe-type instruments. The new rotational scanning greatly expands the measurement capabilities of the system. True-to-life cross section measurements can be performed with no blind spots. Wall thicknesses and recessed features can be measured without cutting or destroying the target. In addition, the HDR scanning algorithm provides enhanced scanning capabilities for instantly determining the optimal settings to capture high quality data, even on glossy and matte surfaces.

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VK-X3000 series - 3D Surface Profiler

The VK-X3000 3D Surface Profiler uses a triple scan approach, where laser confocal scanning, focus variation, and white light interferometry measurement methods are used, so that high-accuracy measurement and analysis can be performed on any target. The VK-X3000 has a resolution of 0.01 nm and can scan areas up to 50 x 50 mm (1.97" x 1.97"), allowing for measurement of the overall shape of the target while still maintaining high-resolution for analysis of minute surface features. KEYENCE's new 3D Surface Profiler can handle any target, including those with transparent or mirrored surfaces, large height changes, or steep angles.

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