Microscopes & 3D Measurement Systems

The VHX-7000 Series is a fully-automated system that enables even novice users to capture high-resolution images that rival an SEM. The Optical Shadow Effect Mode features a combination of specially designed high-resolution lenses, a 4K CMOS, and high-performance lighting that enables minute surface details to be observed and analyzed. The seamless transition in magnification from 20x to 6000x using a motorized turret offers a stress-free observation environment. The VHX-7000 Series 4K digital microscope offers the highest level of automation and best picture quality in the VHX Series.

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VL Series 3D Scanner CMMs can measure large targets in 3D from all directions, providing full 360° scanning capability. The motorized turntable moves in the X, Y, and θ directions for fully automated recognition and scanning of the measurement target. The high-magnification lens captures up to 16 million data points, allowing for the acquisition of precise data on small targets and complex shapes that cannot be measured with conventional scanners. Full 360° scans can be compared directly against CAD data, allowing for easy detection of deviations from design values, quick determination of good vs. bad parts, and wear analysis before and after use of a product.

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The VR-6000 Optical Profilometer performs non-contact measurement to replace stylus profilometers and roughness meters. This 3D profile system captures full surface data across the target with a resolution of 0.1 μm, enabling measurement of features that cannot be performed with probe-type instruments. The new rotational scanning greatly expands the measurement capabilities of the system. True-to-life cross section measurements can be performed with no blind spots. Wall thicknesses and recessed features can be measured without cutting or destroying the target. In addition, the HDR scanning algorithm provides enhanced scanning capabilities for instantly determining the optimal settings to capture high quality data, even on glossy and matte surfaces.

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The VK-X3000 3D Surface Profiler uses a triple scan approach, where laser confocal scanning, focus variation, and white light interferometry measurement methods are used, so that high-accuracy measurement and analysis can be performed on any target. The VK-X3000 has a resolution of 0.01 nm and can scan areas up to 50 x 50 mm (1.97" x 1.97"), allowing for measurement of the overall shape of the target while still maintaining high-resolution for analysis of minute surface features. KEYENCE's new 3D Surface Profiler can handle any target, including those with transparent or mirrored surfaces, large height changes, or steep angles.

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