Microscopes & 3D Measurement Systems

Our flagship model within the VHX Series, this microscope delivers highest-in-class resolution with new lighting and imaging modes to bring out even the most subtle surface details. With fully-motorized operation, this system supports a wide range of imaging and analysis capabilities including elemental analysis, metallurgical analysis with new high-resolution objectives and software, a 300 mm stage for wafers and other large parts, and functions for image comparisons and automation.

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The VL-800 Series 3D Scanner CMM is the first in its lineup to feature 3D-AI, making high-quality 3D data acquisition and analysis effortless for any user. The system intelligently recommends optimal scanning, stitching, and measurement methods based on the shape of the part being analyzed. Additionally, scanned parts can be directly compared to their CAD models for quick visualization of differences, or the 3D scan can be used to streamline reverse engineering processes. From scanning to STEP file output, the VL-800 handles everything automatically, and provides accurate data in a format accessible by any CAD software.

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The VR-6000 optical profilometer performs non-contact measurement to replace stylus profilometers and roughness meters. This 3D profile system captures full surface data across the target with a resolution of 0.1 µm, enabling measurement of features that cannot be performed with probe-type instruments. The new rotational scanning greatly expands the measurement capabilities of the system. True-to-life cross section measurements can be performed with no blind spots. Wall thicknesses and recessed features can be measured without cutting or destroying the target. In addition, the HDR scanning algorithm provides enhanced scanning capabilities for instantly determining the optimal settings to capture high quality data, even on glossy and matte surfaces.

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The VK-X3000 3D Surface Profiler uses a triple scan approach, where laser confocal scanning, focus variation, and white light interferometry measurement methods are used, so that high-accuracy measurement and analysis can be performed on any target. The VK-X3000 has a resolution of 0.01 nm and can scan areas up to 50 × 50 mm (1.97″ × 1.97″), allowing for measurement of the overall shape of the target while still maintaining high-resolution for analysis of minute surface features. KEYENCE's new 3D Surface Profiler can handle any target, including those with transparent or mirrored surfaces, large height changes, or steep angles.

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