Microscopes & 3D Measurement Systems

The VHX-7000 Series is a fully-automated system that enables even novice users to capture high-resolution images that rival an SEM. The Optical Shadow Effect Mode features a combination of specially designed high-resolution lenses, a 4K CMOS, and high-performance lighting that enables minute surface details to be observed and analyzed. The seamless transition in magnification from 20x to 6000x using a motorized turret offers a stress-free observation environment. The VHX-7000 Series 4K digital microscope offers the highest level of automation and best picture quality in the VHX Series. The VHX-7000 Series can now be equipped with an elemental analyzer, making it possible to perform material identification with no destruction, deposition, or vacuum required.

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The VR-6000 Optical Profilometer performs non-contact measurement to replace stylus profilometers and roughness meters. This 3D profile system captures full surface data across the target with a resolution of 0.1 μm, enabling measurement of features that cannot be performed with probe-type instruments. The new rotational scanning greatly expands the measurement capabilities of the system. True-to-life cross section measurements can be performed with no blind spots. Wall thicknesses and recessed features can be measured without cutting or destroying the target. In addition, the HDR scanning algorithm provides enhanced scanning capabilities for instantly determining the optimal settings to capture high quality data, even on glossy and matte surfaces.

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The VK-X3000 3D Surface Profiler uses a triple scan approach, where laser confocal scanning, focus variation, and white light interferometry measurement methods are used, so that high-accuracy measurement and analysis can be performed on any target. The VK-X3000 has a resolution of 0.01 nm and can scan areas up to 50 x 50 mm (1.97" x 1.97"), allowing for measurement of the overall shape of the target while still maintaining high-resolution for analysis of minute surface features. KEYENCE's new 3D Surface Profiler can handle any target, including those with transparent or mirrored surfaces, large height changes, or steep angles.

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The BZ-X Series is an all-in-one fluorescence microscope equipped with advanced observation capabilities, a fully motorized control system for instant target acquisition, and advanced imaging and analysis functions. With a built-in darkroom and an installation area of ~ 1' x 2' the BZ-X can be set up in any location for optimal testing efficiency. The high-sensitivity, cooled CCD camera can be switched between monochrome and color imaging, and supports fluorescence, brightfield, and phase contrast imaging. The large motorized stage can quickly move to the desired observation location, while high-speed auto-focusing and automatic capture conditions allow any user to easily capture publication-quality images. Additionally, the BZ-X Series is capable of three-dimensional analysis, motion analysis, and time-series quantification.

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