High-magnification & Non-contact measurement
Assets on GaAs due to liquid phase growth (3000×):
Provided by Prof. Tadaaki Kaneko, Department of Chemistry, School of Science and Technology, Kansei Gakuin University
The VK-X Series Laser Scanning Microscope is able to perform non-contact profile, roughness, and film thickness measurements on any material, regardless of the complexity of the surface. With the ability to capture surface information with nanometer-level resolution, users no longer have to be limited by traditional metrology tools, such as interferometers and contact profilers.
Unmatched sensitivity with steep angle-of-detectionLight guide panel: Area and volume measurement (3000×)
Measure film thickness
Nanometer Resolution & 1-Click measurementSteering component: Roughness measurement (400×, two images stitched)