Automatically Analyze and Compare 3D Surfaces

  • 3D Laser Scanning Confocal Microscope
  • VK-X250/150/120

What is the VK-X Series?

The VK-X Series is a laser scanning confocal microscope capable of ultra-fine, non-contact profile measurements. Laser scanning microscopes use He-Ne gas lasers or semiconductor lasers as a light source for microscopic inspection. Laser scanning microscopes that use a special optical system known as a “confocal optical system” are known as confocal microscopes. Offering microscopic observation at up to 28,800× magnification with a measuring resolution of 0.5 nanometers, the VK-X Series is a microscope/measuring instrument hybrid.

New feature

Visualize surface differences with new tools

  • Good product Ra: 1.8Good product Ra: 1.8
  • Defective product Ra: 1.8Defective product Ra: 1.8

The appearance and feel of these two products are different, but it is difficult to determine what values need to be evaluated in order to truly understand what makes them different.

42 roughness parameters are automatically analyzed, and the differences between the two surfaces are displayed.
A graphical rating system is used to quickly show just how different the surfaces are based on the parameter being analyzed.

Easy operation ・ Material Independent ・
Nanometer Resolution

High-magnification & Non-contact measurement High-magnification & Non-contact measurementAssets on GaAs due to liquid phase growth (3000×):
Provided by Prof. Tadaaki Kaneko, Department of Chemistry, School of Science and Technology, Kansei Gakuin University

The VK-X Series Laser Scanning Microscope is able to perform non-contact profile, roughness, and film thickness measurements on any material, regardless of the complexity of the surface. With the ability to capture surface information with nanometer-level resolution, users no longer have to be limited by traditional metrology tools, such as interferometers and contact profilers.

  • Steeply-sloped surfacesSteeply-sloped surfaces

    Unmatched sensitivity with steep angle-of-detectionUnmatched sensitivity with steep angle-of-detectionLight guide panel: Area and volume measurement (3000×)

  • Measure film thicknessMeasure film thickness

    Nanometer Resolution & 1-Click measurementNanometer Resolution & 1-Click measurementSteering component: Roughness measurement (400×, two images stitched)

Download the brochure to learn more!

Please tell us what types of equipment you are currently using.
Are you planning to acquire a new 3D measurement instrument?

Sign In

Business E-mail Address

If you do not have an account, please create one now. You will only need to do this once.

KEYENCE Site Registration

Create an account now for unlimited instant access to all KEYENCE site resources in the future.

  • * required
First Name *
Last Name *
Business E-mail Address *
Country *
Company Name *
Phone Number *
Address *
City *
State *
Zipcode *