Stroke and Positioning
Realtime feedback for position or stroke is important for both process control and process improvement. The target's speed, distance, and accessibility will all impact which type of sensor best suits your needs. Take a look at the typical approaches for position measurement below, or feel free to request a consultation with a local measurement expert.
Angled mirrors can be used for measurement where installation space is limited. This setup enables position detection of tangent circle coordinates or intersection point coordinates as well as simultaneous shape and dimension verification for wafer notches.
Telecentric Measurement System