Inspect for substrate warpage without stopping the line using a 2D laser profiler. The LJ-X Series can check for gaps between the carrier and the substrate without having to stop and scan the part with a 1D sensor, which reduces inspection time.
2D/3D Laser Profiler
Measuring the tiny vibrations of piezoelectric elements is now possible using high speed displacement sensors. The LK-G5000 has the accuracy and speed to capture these fine vibrations in the detail required to confirm the element is functioning properly.
Ultra High-Speed/High-Accuracy Laser Displacement Sensor
Check the tilt of the elements after bonding. The CL-3000 Series uses the multi-color confocal method that enables coaxial measurement. No matter whether the target surfaces are specular or rough, they can be measured in the same setting, which achieves easy and highly accurate inspection.
Confocal Displacement Sensor