Choose your application.

Selecting a Measurement Sensor

Warpage / Flatness

Warpage is generally measured by detecting a target at three points.
Measurement is also possible by moving a target with a point-type sensor, or by directly measuring the shape by projecting a laser in a horizontal line.
Depending on measurement conditions and targets, methods may differ and special arrangements can be made, so contact your nearest sales office with any questions.

Light-Cut Method
LJ Series
LJ Series

Shapes are directly measured by exposing the target to a line laser. Warpage is then measured using the measured waveform data. Also, by moving the target while scanning, 3D shape measurements are also possible.

Key Points for Selection

  • Possible to measure 2D height within a line
  • Unlimited target selection at ultra-high speeds
  • Ability to output waveform data
LJ-V Series
Ultra-High Speed In-line Profilometer
LJ-V Series
Confocal Reflection Method
CL Series
CL Series

Using ultra-compact and lightweight sensors makes it possible to install multiple heads in parallel. By capturing height data at multiple locations on a target, warpage can be calculated inline.

Key Points for Selection

  • High-accuracy non-contact measurement on any surface
  • Ultra-compact and lightweight for easy installation
  • Stable, repeatable measurement across a wide range
CL-3000 Series
Confocal Displacement Sensor
CL-3000 Series
Triangulation Reflection Method
LK Series
LK Series

After scanning a target using an optical reflective-type measurement instrument, the warpage is measured using the height data of any three points. The LK-G Series offers ultra-high speed sampling, allowing for stable measurements even with scanning.

Key Points for Selection

  • Target selection not determined by transparency/opacity or color
  • Non-contact measurement possible
  • Small beam spot and high speed
LK-G5000 Series
Ultra High-Speed/High-Accuracy Laser Displacement Sensor
LK-G5000 Series
Contact-Type
GT Series
GT Series

To measure warpage, contact sensors are used for detection at three points.
Measurement can be easily performed by setting the warpage measurement mode using the calculation function of the GT2 Series instrument.

Key Points for Selection

  • Target selection only determined by solidity
  • High-precision measurement possible
GT2 Series
High-Accuracy Digital Sensor
GT2 Series
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