3D Optical Profilometer Head (Fully-automated model) VR-6200

Model

VR-6200

Type

Head

Operating System

Windows 10 Professional / Windows 11 Professional

Controller

VR-6000

Field of view

Low magnification (wide field of view)

Magnification on a 15" monitor 12×

Horizontal

24.0 mm 0.94"

Vertical

18.0 mm 0.71"

Magnification on a 15" monitor 25×

Horizontal

12.0 mm 0.47"

Vertical

9.0 mm 0.35"

Magnification on a 15" monitor 38×

Horizontal

8.0 mm 0.31"

Vertical

6.0 mm 0.24"

Magnification on a 15" monitor 50×

Horizontal

Vertical

4.5 mm 0.18"

High magnification (high resolution)

Magnification on a 15" monitor 40×

Horizontal

7.6 mm 0.30"

Vertical

5.7 mm 0.22"

Magnification on a 15" monitor 80×

Horizontal

3.8 mm 0.15"

Vertical

2.9 mm 0.11"

Magnification on a 15" monitor 120×

Horizontal

2.5 mm 0.10"

Vertical

1.9 mm 0.07"

Magnification on a 15" monitor 160×

Horizontal

Vertical

1.4 mm 0.06"

Zoom

1× to 4×

Height measurement

Display resolution

0.1 μm

Height measurement range

Without Z stitching

Low magnification (wide field of view): 10 mm 0.39"
High magnification (high resolution): 1 mm 0.04"

With Z stitching

Low magnification (wide field of view): 50 mm 1.97"
High magnification (high resolution): 30 mm 1.18"

Repeatability (σ)

Without Z stitching

0.4 μm ^*1

With Z stitching

1.0 μm ^*1

Measurement accuracy

Without Z stitching

±2.5 μm ^*1

With Z stitching

±4.0 μm ^*1

Width measurement

Repeatability (σ)

Low magnification (wide field of view): 1 μm
High magnification (high resolution): 0.5 μm
^*1

Measurement accuracy

Low magnification (wide field of view): ±5 μm
High magnification (high resolution): ±2 μm
^*1

Stitching function

Fully-automated measurement (XY automatic control + Z automatic control, θ automatic control), Automatic mapping creation, Automatic area setting ^*2

Stitching function

Motorized rotational unit

Supported ^*2

XY measurable range

300 × 150 mm 11.81" × 5.91" ^*2

Stage

XY stroke

278 × 134 mm 10.94" × 5.28" (motorized)

Z stroke

69 mm 2.72" (motorized)

Load capacity

4.5 kg 9.92 lb

Working distance

75 mm 2.95"

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double-telecentric lens × 2

Receiver lens

Double-telecentric lens

Light sources

Observation light source

LED ring light (red, blue, green)

Measurement light source

White LED

Data processing

Dedicated PC specified by KEYENCE

Power supply

Power voltage

100 to 240 VAC ±10%, 50/60 Hz

Power consumption

200 VA max.

Environmental resistance

Ambient temperature

+15 to 30°C +59 to 86°F

Relative humidity

20 to 80% RH (no condensation)

Weight

Approx. 28 kg 61.73 lb ^*3