Spectral Interference Displacement Sensor
With KEYENCE’s spectral interference displacement sensors, it’s possible to measure absolute distance with nanometer-level resolution. Sometimes referred to as spectral interferometers, these specialized sensors are used to accurately measure distance, position, and thickness in a variety of industries.
Product Lineup
Introducing the world’s first micro-head, with the highest measurement accuracy in its class and a level of performance that was previously thought impossible.
With the adoption of the near-infrared SLD, thickness measurement for the wafer alone is possible even while BG tape is affixed. Even when there is strong pattern-based variation on the surface of the wafer, accurate in-line measurement is possible.