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3D Surface Profiler

A non-contact 3D surface profiler designed to capture SEM-like images and perform high-resolution profile, roughness, and film thickness analysis. For the first time, nanometer, micrometer, and millimeter measurements can be performed on any target, regardless of shape or material.

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VK-X3000 series - 3D Surface Profiler

The VK-X3000 3D Surface Profiler uses a triple scan approach, where laser confocal scanning, focus variation, and white light interferometry measurement methods are used, so that high-accuracy measurement and analysis can be performed on any target. The VK-X3000 has a resolution of 0.01 nm and can scan areas up to 50 x 50 mm (1.97" x 1.97"), allowing for measurement of the overall shape of the target while still maintaining high-resolution for analysis of minute surface features. KEYENCE's new 3D Surface Profiler can handle any target, including those with transparent or mirrored surfaces, large height changes, or steep angles.

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VK-X series - 3D Laser Scanning Confocal Microscope

The VK-X Series 3D Laser Scanning Confocal Microscope is equipped with a white light source and a laser source. The dual light source allows for capturing of both high-resolution height data on the surface of targets, as well as full-color images.

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Benefits of 3D Surface Profilers

3D Surface Profiler Case Studies

Frequently Asked Questions About 3D Surface Profilers