3D Laser Scanning Confocal MicroscopeVK-X series


Measurement head: Violet semiconductor laser


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Head unit

Total magnification

Up to 28,800 x*1

Field of view (minimum range)

11 µm to 7,398 µm

Frame rate (laser measurement speed)

4 to 125 Hz, 7,900 Hz*2

Measurement principle

Optical system

Pinhole confocal optical system, Focus variation

Light-receiving element

16-bit photomultiplier: High-definition color CMOS

Scanning method (during general measurement and image stitching)

Automatic upper/lower limit setting, high-speed light intensity optimization (AAGII) , poor reflected light intensity supplement (Double Scan)

Height measurement

Display resolution

0.5 nm

Linear scale

Dynamic range

16 bits

Repeatability σ

Laser confocal

20 x: 40 nm, 50 x: 12 nm

Focus variation

5 x: 500 nm, 10 x: 100 nm, 20 x: 50 nm, 50 x: 20 nm

Height data acquisition range

700,000 steps


0.2 + L /100 µm or less (L = Measuring length)*3

Width measurement

Display resolution

1 nm

Repeatability 3σ

Laser confocal

20 x: 100 nm, 50 x: 50 nm

Focus variation

5 x: 400 nm, 10 x: 400 nm, 20 x: 120 nm, 50 x: 50 nm


Measured value ±2 % or less*3

XY stage configuration

Manual: Operating range

70 mm x 70 mm 2.76" x 2.76"

Motorized: Operating range

100 mm x 100 mm3.94" x 3.94"


Observation image

High-resolution color CMOS image 16-bit laser color confocal image Confocal + ND filter optical system C-laser differential interference image


Ring illumination, coaxial illumination

Measurement laser light source


Violet semiconductor laser, 404 nm

Maximum output

1 mW

Laser class

Class 2 laser product (IEC60825-1, FDA (CDRH) Part 1040.10*4)

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

150 VA


Approx. 13.0 kg

*1 When using a 23 inch full-screen display.
*2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan has a measurement pitch that is within 0.1 µm.
*3 When measuring a standard sample (standard scale) with a 20 x or greater lens.
*4 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.

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