Image Dimension Measurement System

IM-X1000 series

small stage IM-X1220

IM-X1220 - small stage

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Specifications

Model				IM-X1220
Type				Stage unit
Head used				IM Head, LM Head
Measurement range (X × Y)	Image measurement	Wide-field mode [mm inch]		IM Head: 200 × 200 7.87" × 7.87", LM Head: 125 × 125 4.92" × 4.92"
		High-precision mode [mm inch]		IM Head: 125 × 125 4.92" × 4.92", LM Head: 106 × 106 4.17" × 4.17"
	AF height [mm inch]			IM Head: —, LM Head: 100 × 100 3.94" × 3.94"
	Laser height [mm inch]			—
	Touch probe [mm inch]
Z stage	Moving range [mm inch]			150 5.91"
Measurement accuracy	X/Y axis (EUX, MPE EUY, MPE)			1.8 + 0.02 L µm^1 ^2
	X/Y plane (EUXY, MPE)			2.8 + 0.02 L µm^1 ^2
	Z axis (EUZ, MPE)			IM Head: —, LM Head: 3.8 + 0.04 L µm^3 ^4
Load capacity				15 kg^*5 33.07 lb
Ratings	Power voltage			24 VDC
	Current consumption			7.5 A
Environmental resistance	Ambient temperature			+10 to 35°C^*6 +50°F to 95°F
Weight				29 kg 63.93 lb
^1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage. ^2 In accordance with ISO10360-2 when measuring with touch probe; X/Y axis 2.8 + 0.02 L µm; XY plane 3.8 + 0.02 L µm. ^3 In accordance with ISO10360-7; in accordance with ISO10360-2 when measuring with touch probe; L is the amount of Z stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F; with KEYENCE reference workpiece; with maximum measurement target height setting of 62 mm 2.44" or less. ^4 At 3.8 + 0.08 L µm if the maximum measurement target height exceeds 62 mm 2.44". ^5 5 kg 11.02lb at XY stage travel speed of 120 mm/s 4.72"/s. ^6 +15 to 35°C +59°F to 95°F at XY stage travel speed of 120 mm/s 4.72"/s.

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