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3D Interference Measurement SensorWI-5000 series

Sensor head Standard type

WI-004

SPECIFICATIONS

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Model

WI-004*1*2*3

Reference distance

18 mm 0.71"

Measurement range

Z

1.4 mm 0.06" (Standard Mode), 0.7 mm 0.03" (High Speed Mode)

XY

4 × 4 mm 0.16" × 0.16"

Minimum detection area

15 × 15 µm 0.000591" × 0.000591"

Repeatability (height difference)

0.1 µm 0.000004"*4

Linearity (height difference)

±2.8 µm 0.000110"(±0.2% of F.S., F.S. = 1.4 mm 0.06", +20 to +30°C +68 to +86°F)*5

Light source for measurement

Type

Infrared SLD

Center wavelength

830 nm

Laser class (IEC60825-1)

Class 3R

Output

3.6 mW

Guide light source

Type

Red semiconductor laser

Wavelength

660 nm

Laser class (IEC60825-1)

Class 1

Output

0.15 mW

Sampling frequency

Internal Trigger

133 ms (High Speed Mode), 266 ms (Standard Mode)

External Trigger

266 ms max. (High Speed Mode), 532 ms max. (Standard Mode)*6

Environmental resistance

Ambient light

Incandescent lamp/fluorescent lamp: 5,000 lux max.

Ambient temperature

0 to +35 °C 32 to 95 °F

Relative humidity

20 to 85 % RH (No condensation)

Weight

Approx. 3,000 g

*1 The laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.The resolution of the height (distance from head reference plane to measurement workpiece) is 1 µm(*2).
*2 This is ±3 σ value (Auto Maintenance Mode is OFF) when the average height of a single rectangular area(*3) has been measured for 30 seconds using a KEYENCE standard target.
*3 The rectangular size is WI-001 : 0.3 mm × 0.9 mm 0.01" × 0.04", WI-004 : 1.1 mm × 3.7 mm 0.04" × 0.15", WI-010 : 3 mm × 9 mm 0.12" × 0.35".
*4 This is σ value (Auto Maintenance Mode is OFF, Capture Timing is “Prioritize Accuracy”) when the average height difference of two rectangular areas(*3) has been measured for 30 seconds using a KEYENCE standard target.
*5 This is the value (Auto Maintenance Mode is OFF, Capture Timing is “Prioritize Accuracy”) when the average height difference of two rectangular areas(*3) has been measured using a KEYENCE standard target.
*6 The workpiece stopping time at capturing is 120 ms (High Speed Mode) or 240 ms (Standard Mode).

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