3D Interference Measurement Sensor
WI-5000 series
Sensor head Wide-field Model WI-010
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model  | WI-010*1*2*3  | |||
Reference distance  | 18 mm 0.71"  | |||
Measurement range  | Z  | 1.4 mm 0.06" (Standard Mode), 0.7 mm 0.03" (High Speed Mode)  | ||
XY  | 10 × 10 mm 0.39" × 0.39"  | |||
Minimum detection area  | 40 × 40 µm 0.001575" × 0.001575"  | |||
Repeatability (height difference)  | 0.1 µm 0.000004"*4  | |||
Linearity (height difference)  | ±2.8 µm 0.000110"(±0.2% of F.S., F.S. = 1.4 mm 0.06", +20 to +30°C +68 to +86°F)*5  | |||
Light source for measurement  | Type  | Infrared SLD  | ||
Center wavelength  | 830 nm  | |||
Laser class (IEC60825-1)  | Class 3R  | |||
Output  | 3.6 mW  | |||
Guide light source  | Type  | Red semiconductor laser  | ||
Wavelength  | 660 nm  | |||
Laser class (IEC60825-1)  | Class 1  | |||
Output  | 0.15 mW  | |||
Sampling frequency  | Internal Trigger  | 133 ms (High Speed Mode), 266 ms (Standard Mode)  | ||
External Trigger  | 266 ms max. (High Speed Mode), 532 ms max. (Standard Mode)*6  | |||
Environmental resistance  | Ambient light  | Incandescent lamp/fluorescent lamp: 5,000 lux max.  | ||
Ambient temperature  | 0 to +35 °C 32 to 95 °F  | |||
Relative humidity  | 20 to 85 % RH (No condensation)  | |||
Weight  | Approx. 3,000 g  | |||
*1 The laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice.The resolution of the height (distance from head reference plane to measurement workpiece) is 1 µm(*2).  | ||||