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          Digital MicroscopeVHX-6000 series

          Large free-angle observation system (XYZ motorized)



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          XYθ stage

          XY stage: Motorized/Manual


          XY-motorized stage motor

          2-phase stepping motor

          XY-motorized stage resolution

          1 µm (typ.)

          XY-motorized stage movement speed

          20 mm 0.79"/sec (max.)

          XY-stage movement range

          ±50 mm ±1.97"

          XYθ stage size

          Top surface: 233 × 185 mm 9.17" × 7.28" (Center disc: ø168 ø6.61")

          Transmitted lighting


          Z stage

          Z stage: Motorized/Manual


          Z-motorized stage motor

          5-phase stepping motor

          Z-motorized stage resolution

          0.1 µm (typ.)

          Z-motorized stage travel speed

          17 mm 0.67"/sec (max)

          Z-stage movement range

          49 mm 1.93"

          Load capacity

          5 kg

          Power supply

          Power voltage

          100 to 240 VAC, 50/60 Hz

          Power consumption

          60 VA

          Environmental resistance

          Ambient temperature

          +5 to +40 °C 41 to 104 °F

          Relative humidity

          35 to 80 % RH (No condensation)


          Approx. 20 kg

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          Microscopes / 3D Surface Profilers