Wide-Area 3D Measurement System

VR series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Recommended Replaceable Products: 3D Optical Profilometer Head (Fully-automated model) - VR-6200

Wide-Area 3D Measurement System Head VR-3200

VR-3200 - Wide-Area 3D Measurement System Head

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Data Sheet (PDF)

Specifications

Model				VR-3200
Type				Head
Applicable controller				VR-3000K
Field-of-view	Wide-field mode	Magnification on a 15" monitor 12x	Horizontal	24.0 mm 0.94"
			Vertical	18.0 mm 0.71"
		Magnification on a 15" monitor 25x	Horizontal	12.0 mm 0.47"
			Vertical	9.0 mm 0.35"
		Magnification on a 15" monitor 38x	Horizontal	8.0 mm 0.31"
			Vertical	6.0 mm 0.24"
		Magnification on a 15" monitor 50x	Horizontal
			Vertical	4.5 mm 0.18"
	High magnification mode	Magnification on a 15" monitor 40x	Horizontal	7.6 mm 0.30"
			Vertical	5.7 mm 0.22"
		Magnification on a 15" monitor 80x	Horizontal	3.8 mm 0.15"
			Vertical	2.9 mm 0.11"
		Magnification on a 15" monitor 120x	Horizontal	2.5 mm 0.10"
			Vertical	1.9 mm 0.07"
		Magnification on a 15" monitor 160x	Horizontal
			Vertical	1.4 mm 0.06"
Zoom				1x to 4x
Measurable height				Wide-field mode：10 mm 0.39" (±5 mm ±0.20") High magnification mode：1 mm 0.04" (±0.5 mm ±0.02")^*1
Display resolution				0.1 µm^*2
Repeatability (σ)	Height measurement			0.5 µm^*3
	Width measurement			Wide-field mode: 1 µm, High magnification mode: 0.5 µm^*3
Measurement accuracy	Height measurement			±3 µm^*3
	Width measurement			Wide-field mode: ±5 µm, High magnification mode: ±2 µm^*3
Stitching function				Full automatic (XY stage automatic control + auto focus) measurement^4 Auto adjustment, Auto template analysis^4
Stage	XY stroke			184 × 88 mm 7.24" x 3.46" (motorized)
	Z stroke			90 mm 3.54"(electric)
	Rotation			±180°(sample rotating stage)
	Tilt			±30° or more
Working distance				75 mm 2.95"
Image receiving element				4 megapixel monochrome CMOS
Transmitter lens				Double telecentric lens x2
Receiver lens				Double telecentric lens
Light sources	Observation light source			LED ring light (red, green, blue)
	Measurement light source			White LED
Image size				1024 x 768 pixels, 2048 x 1536 pixels
Data processing				Dedicated PC specified by KEYENCE (OS: Windows 7)^*5
Rating	Power voltage			100 to 240 VAC ±10 %, 50/60 Hz
	Power consumption			150 VA
Environmental resistance	Ambient temperature			+15 to +30 °C 59 to 86 °F
	Relative humidity			35 to 80 % RH (No condensation)
Weight				28.0 kg
^1 Low range ±5 mm 0.20" and high range ±0.5 mm ±0.02" around the focal point position. ^2 Height measurement resolution. ^3 Value obtained using KEYENCE's specified standard gauge with measurement in KEYENCE's specified measurement mode (ambient temperature: 23±1°C 73.4±1.8°F). ^4 The stitching module (VR-H2J) is required. ^*5 Windows 7 Professional and Ultimate.

Data Sheet (PDF) Other Models