3D Optical Profilometer

VR-6000 series

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3D Optical Profilometer Head (Standard model) VR-6100

VR-6100 - 3D Optical Profilometer Head (Standard model)

  • CE Marking
  • CSA

Specifications

Model

VR-6100

Type

Head

Controller

VR-6000

Field of view

Low magnification (wide field of view)

Magnification on a 15" monitor 12×

Horizontal

24.0 mm 0.94"

Vertical

18.0 mm 0.71"

Magnification on a 15" monitor 25×

Horizontal

12.0 mm 0.47"

Vertical

9.0 mm 0.35"

Magnification on a 15" monitor 38×

Horizontal

8.0 mm 0.31"

Vertical

6.0 mm 0.24"

Magnification on a 15" monitor 50×

Horizontal

Vertical

4.5 mm 0.18"

High magnification (high resolution)

Magnification on a 15" monitor 40×

Horizontal

7.6 mm 0.30"

Vertical

5.7 mm 0.22"

Magnification on a 15" monitor 80×

Horizontal

3.8 mm 0.15"

Vertical

2.9 mm 0.11"

Magnification on a 15" monitor 120×

Horizontal

2.5 mm 0.10"

Vertical

1.9 mm 0.07"

Magnification on a 15" monitor 160×

Horizontal

Vertical

1.4 mm 0.06"

Zoom

1× to 4×

Height measurement

Display resolution

0.1 μm

Height measurement range

Without Z stitching

Low magnification (wide field of view): 10 mm 0.39"
High magnification (high resolution): 1 mm 0.04"

With Z stitching

Low magnification (wide field of view): 50 mm 1.97"
High magnification (high resolution): 30 mm 1.18"

Repeatability (σ)

Without Z stitching

0.4 μm *1

With Z stitching

1.0 μm *1

Measurement accuracy

Without Z stitching

±2.5 μm *1

With Z stitching

±4.0 μm *1

Width measurement

Repeatability (σ)

Low magnification (wide field of view): 1 μm
High magnification (high resolution): 0.5 μm
*1

Measurement accuracy

Low magnification (wide field of view): ±5 μm
High magnification (high resolution): ±2 μm
*1

Stitching function

Manual measurement (XY manual operation + Z automatic control) *2

Stitching function

Motorized rotational unit

Not supported

XY measurable range

92 × 86 mm 3.62" × 3.39" *2

Stage

XY stroke

70 × 70 mm 2.76" × 2.76" (manual)

Z stroke

69 mm 2.72" (motorized)

Load capacity

4.5 kg 9.92 lb

Working distance

75 mm 2.95"

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double-telecentric lens × 2

Receiver lens

Double-telecentric lens

Light sources

Observation light source

LED ring light (red, blue, green)

Measurement light source

White LED

Data processing

Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)

Power supply

Power voltage

100 to 240 VAC ±10%, 50/60 Hz

Power consumption

200 VA max.

Environmental resistance

Ambient temperature

+15 to 30°C +59 to 86°F

Relative humidity

20 to 80% RH (no condensation)

Weight

Approx. 25 kg 55.12 lb *3

*1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23±1°C 73.4±1.8°F)
*2 Measurement expansion module (VR-H4J) required
*3 Weight of only measurement unit: Approx. 11 kg 24.25 lb

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