United States

Position detection of wafer notches

Position detection of wafer notches

The vision system detects the rotational position of wafer notches.

The resolution of the 5 Mega pixel camera and the built-in algorithms of the Trend Edge Stain tool makes it possible to stably detect the notch and also output the position and dimensional data.

Benefit

A 2 Mega-pixel camera was used to detect the position of the notch, but the repeatability of the camera was not stable. By implementing the XG Series system, a 5 Mega pixel high-speed camera and the new Trend Edge Stain tool, the notch was stably located.

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KEYENCE CORPORATION OF AMERICA 500 Park Boulevard, Suite 200, Itasca,
IL 60143, U.S.A.
Phone: 1-888-KEYENCE [1-888-539-3623]
E-mail: tech@keyence.com
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