Laser Scanning Confocal Microscopes

Laser Scanning Microscopes

Laser scanning microscopes incorporate two light sources: a white light for gathering color information, and a laser source for gathering height information. To capture height data, the laser is scanned in the XYZ directions across the surface of the sample, and the reflected light intensity is measured. The result is a high-resolution, large depth-of-field, color image with nanometer-level height resolution for accurate profile and roughness measurements. This equipment combines the functionality of an optical microscope, scanning electron microscope, and surface roughness gauge.

Functional diagram of measurement principle. 1. The laser scans in the X and Y directions. 2. The objective lens moves in the Z direction and the laser scans in the X and Y directions again. 3. This scanning procedure is repeated until the end of the measurement depth is reached. 4. The measurement is then complete.

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