large stage IM-X1540

IM-X1540 - large stage

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

  • CE Marking
  • CSA

Specifications

Model

IM-X1540

Type

Stage unit

Head used

IM Head, LM Head

Measurement range (X × Y)

Image measurement

Wide-field mode [mm inch]

IM Head: 500 × 400 19.69" × 15.75", LM Head: 425 × 325 16.73" × 12.80"

High-precision mode [mm inch]

IM Head: 425 × 325 16.73" × 12.80", LM Head: 406 × 306 15.98" × 12.05"

AF height [mm inch]

IM Head: —, LM Head: 400 × 300 15.75" × 11.81"

Laser height [mm inch]

IM Head: 368 × 268 14.49" × 10.55", LM Head: 396 × 239 15.59" × 9.41"

Touch probe [mm inch]

IM Head: 346 × 296 13.62" × 11.65", LM Head: 350 × 296 13.78" × 11.65"

Z stage

Moving range [mm inch]

200 7.87"

Measurement accuracy

X/Y axis (EUX, MPE EUY, MPE)

1.8 + 0.02 L µm*1 *2

X/Y plane (EUXY, MPE)

2.8 + 0.02 L µm*1 *2

Z axis (EUZ, MPE)

3.8 + 0.04 L µm*3 *4

Load capacity

15 kg*5 33.07 lb

Ratings

Power voltage

24 VDC

Current consumption

7.5 A

Environmental resistance

Ambient temperature

+10 to 35°C*6 +50°F to 95°F

Weight

70 kg 154.32 lb

*1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage.
*2 In accordance with ISO10360-2 when measuring with touch probe; X/Y axis 2.8 + 0.02 L µm; XY plane 3.8 + 0.02 L µm.
*3 In accordance with ISO10360-7; in accordance with ISO10360-2 when measuring with touch probe; L is the amount of Z stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F; with KEYENCE reference workpiece; with maximum measurement target height setting of 62 mm 2.44" or less.
*4 At 3.8 + 0.08 L µm if the maximum measurement target height exceeds 62 mm 2.44".
*5 5 kg 11.02lb at XY stage travel speed of 120 mm/s 4.72"/s.
*6 +15 to 35°C +59°F to 95°F at XY stage travel speed of 120 mm/s 4.72"/s.

Data Sheet (PDF) Other Models