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          High Accuracy Image Dimension Measurement SystemLM series

          Head

          LM-1100

          SPECIFICATIONS

          Select Language

          Model

          LM-1100

          Type

          Head

          Image sensor

          1", 20-mega pixel monochrome CMOS

          Display

          10.4" LCD monitor (XGA: 1024 × 768)

          Receiver lens

          Double telecentric lens

          Image measurement

          Field of view

          Wide-field measurement mode

          225 mm × 125 mm 8.86" × 4.92"

          High-precision measurement mode

          206 mm × 106 mm 8.11" × 4.17"

          Minimum display unit

          0.1 µm

          Repeatability

          Inside camera's field of view (2σ)

          Wide-field measurement mode

          ±0.5 µm

          High-precision measurement mode

          ±0.1 µm

          With stage movement

          X/Y axis

          ±0.9 µm

          X/Y plane

          Measurement accuracy

          Inside camera's field of view (2σ)

          Wide-field measurement mode

          ±2 µm*1

          High-precision measurement mode

          ±0.7 µm*2

          With stage movement

          X/Y axis (EUX,MPE , EUY,MPE)

          ±(1.8 + 0.02 L) µm*3

          X/Y plane (EUXY,MPE)

          ±(2.8 + 0.02 L) µm*3

          Height measurement

          Repeatability

          ±2 µm

          Measurement accuracy

          ±(4.8 + 0.04 L) µm*4

          External remote input

          Non-voltage input (with and without contact)

          External output

          OK/NG/FAIL/MEAS.

          PhotoMOS output
          Rated load 24 V DC, 0.5 A
          ON resistance 50 mΩ or lower

          Interface

          LAN

          RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

          USB 3.1

          2 ports (rear: 2)

          USB 2.0 Series A

          4 ports (front: 2, rear: 2)

          Monitor output

          DVI-D

          Record

          Hard disk drive

          500 GB

          Illumination system

          Transparent

          Telecentric transparent illumination

          Ring

          Four division, multi-angle illumination (electric)
          Slit ring (directivity) illumination (electric)
          Telecentric coaxial illumination

          External illumination control

          Intensity control

          PWM control, 100 kHz

          Output voltage

          12 V DC

          Output current

          1.6 A (max.)

          XY stage

          Moving range

          200 mm × 100 mm 7.87" × 3.94" (electric)

          Withstand load

          7 kg

          Z stage

          Moving range

          75 mm 2.95" (electric)

          Power supply

          Power voltage

          100 to 240 V AC ±10% (50/60 Hz)

          Power consumption

          430 VA or lower

          Environmental resistance

          Ambient temperature

          +10 to 35°C +50 to 95°F*5

          Relative humidity

          20–80% RH (no condensation)

          Overvoltage category

          ll

          Pollution degree

          2

          Weight

          Approx. 30 kg

          *1 In the range of 20 mm × 20 mm 0.79" × 0.79" within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position.
          *2 In the range of 5 mm × 5 mm 0.20" × 0.20" within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
          *3 In accordance with ISO10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of X/Y stage movement in mm units)
          *4 In accordance with ISO10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to a maximum measurement of 50 mm 1.97" or less, (L = amount of Z stage movement in mm units).
          *5 +15 to 35°C +59 to 95°F with X/Y stage travel speed of 80 mm/s.

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