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High Accuracy Image Dimension Measurement SystemLM series

Head

LM-1100

SPECIFICATIONS

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Model

LM-1100

Type

Head

Image sensor

1", 20-mega pixel monochrome CMOS

Display

10.4" LCD monitor (XGA: 1024 × 768)

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide-field measurement mode

225 mm × 125 mm 8.86" × 4.92"

High-precision measurement mode

206 mm × 106 mm 8.11" × 4.17"

Minimum display unit

0.1 µm

Repeatability

Inside camera's field of view (2σ)

Wide-field measurement mode

±0.5 µm

High-precision measurement mode

±0.1 µm

With stage movement

X/Y axis

±0.9 µm

X/Y plane

Measurement accuracy

Inside camera's field of view (2σ)

Wide-field measurement mode

±2 µm*1

High-precision measurement mode

±0.7 µm*2

With stage movement

X/Y axis (EUX,MPE , EUY,MPE)

±(1.8 + 0.02 L) µm*3

X/Y plane (EUXY,MPE)

±(2.8 + 0.02 L) µm*3

Height measurement

Repeatability

±2 µm

Measurement accuracy

±(4.8 + 0.04 L) µm*4

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

PhotoMOS output
Rated load 24 V DC, 0.5 A
ON resistance 50 mΩ or lower

Interface

LAN

RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 3.1

2 ports (rear: 2)

USB 2.0 Series A

4 ports (front: 2, rear: 2)

Monitor output

DVI-D

Record

Hard disk drive

500 GB

Illumination system

Transparent

Telecentric transparent illumination

Ring

Four division, multi-angle illumination (electric)
Slit ring (directivity) illumination (electric)
Telecentric coaxial illumination

External illumination control

Intensity control

PWM control, 100 kHz

Output voltage

12 V DC

Output current

1.6 A (max.)

XY stage

Moving range

200 mm × 100 mm 7.87" × 3.94" (electric)

Withstand load

7 kg

Z stage

Moving range

75 mm 2.95" (electric)

Power supply

Power voltage

100 to 240 V AC ±10% (50/60 Hz)

Power consumption

430 VA or lower

Environmental resistance

Ambient temperature

+10 to 35°C +50 to 95°F*5

Relative humidity

20–80% RH (no condensation)

Overvoltage category

ll

Pollution degree

2

Weight

Approx. 30 kg

*1 In the range of 20 mm × 20 mm 0.79" × 0.79" within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position.
*2 In the range of 5 mm × 5 mm 0.20" × 0.20" within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
*3 In accordance with ISO10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of X/Y stage movement in mm units)
*4 In accordance with ISO10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to a maximum measurement of 50 mm 1.97" or less, (L = amount of Z stage movement in mm units).
*5 +15 to 35°C +59 to 95°F with X/Y stage travel speed of 80 mm/s.

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