Spectral-Interference Wafer Thickness Meter

SI-F80R series

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Controller SI-F1000

SI-F1000 - Controller

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)


CAD Data

360°view (3D PDF)


  • CE Marking





Main Controller Separate type*2

No. of connectable spectrum units



Minimum display unit

0.001 µm

Display range

±999.999 µm to ±9999.99 mm (7 settings selectable)

Display cycle

10 times/sec

Terminal block

Laser remote interlock input

Non-voltage or voltage input *3.*4

TIMING1 input

RESET1 input

Auto-zero1 input

Laser control input

Analog voltage output

±10 V x 2 outputs, Output impedance: 100 Ω*4

Analog current output

4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*4

Alarm output

NPN open-collector output (N.C.)*4

General comparator output

NPN open-collector output *5*4

Expansion connector

TIMING2 input

Non-voltage or voltage input *3.*4

RESET input

Auto-zero input

Program switch input

Non-voltage input x 3 inputs*4

Alarm output

NPN open-collector output (N.C.)*4

Comparator/ binary output

Binary output

Measured value data output (21 bits) OUT selectable NPN open-collector output*4

Strobe output

NPN open-collector output *5*4

Binary selection output

Binary selection input

Non-voltage or voltage input *3.*4

RS-232C interface

Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable)

USB interface

In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible)

Ethernet interface


Major functions

12 Out simultaneous measurementcalculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,interferometer mode, mask, connection of setting support software, etc.


Power voltage

24 VDC ±10 %, Ripple (P-P) 10 % or less

Current consumption

One head connected: 0.6 A or less, Six heads connected: 1.5 A or less.

Environmental resistance

Ambient temperature

0 to +50 °C 32 to 122 °F*6

Relative humidity

35 to 85 % RH (No condensation)

Vibration resistance

10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions


Approx. 600 g

*1 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3).
*2 The SI-F1001 can be used independently. The measured value display and setting change can be done with the display panel (SI-FD500) and setup support software (SI-H1).
*3 (NPN model) The rating of non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current. (PNP model) The rating of voltage input: 10.2 V or more ON voltage (26.4 V max.) 0.6 mA or less OFFcurrent.
*4 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
• Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
• Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
devices. For details, refer to "Precautions on wiring".
*5 The rating of the NPN open-collector: 50 mA max. (40 V max.), residual voltage of 0.5 V max. The rating of the PNP open collector: 50 mA max. (30 V max.), residual voltage of 0.5 V max.
*6 When two or more expansion controllers are connected, the ambient temperature is 0 to +40 °C 32 to 104 °F.

Data Sheet (PDF) Other Models