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          Spectral-Interference Wafer Thickness MeterSI-F80R series




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          Main Controller Separate type*2

          No. of connectable spectrum units



          Minimum display unit

          0.001 µm

          Display range

          ±999.999 µm to ±9999.99 mm (7 settings selectable)

          Display cycle

          10 times/sec

          Terminal block

          Laser remote interlock input

          Non-voltage or voltage input *3.*4

          TIMING1 input

          RESET1 input

          Auto-zero1 input

          Laser control input

          Analog voltage output

          ±10 V x 2 outputs, Output impedance: 100 Ω*4

          Analog current output

          4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*4

          Alarm output

          NPN open-collector output (N.C.)*4

          General comparator output

          NPN open-collector output *5*4

          Expansion connector

          TIMING2 input

          Non-voltage or voltage input *3.*4

          RESET input

          Auto-zero input

          Program switch input

          Non-voltage input x 3 inputs*4

          Alarm output

          NPN open-collector output (N.C.)*4

          Comparator/ binary output

          Binary output

          Measured value data output (21 bits) OUT selectable NPN open-collector output*4

          Strobe output

          NPN open-collector output *5*4

          Binary selection output

          Binary selection input

          Non-voltage or voltage input *3.*4

          RS-232C interface

          Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable)

          USB interface

          In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible)

          Ethernet interface


          Major functions

          12 Out simultaneous measurementcalculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,interferometer mode, mask, connection of setting support software, etc.


          Power voltage

          24 VDC ±10 %, Ripple (P-P) 10 % or less

          Current consumption

          One head connected: 0.6 A or less, Six heads connected: 1.5 A or less.

          Environmental resistance

          Ambient temperature

          0 to +50 °C 32 to 122 °F*6

          Relative humidity

          35 to 85 % RH (No condensation)

          Vibration resistance

          10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions


          Approx. 600 g

          *1 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3).
          *2 The SI-F1001 can be used independently. The measured value display and setting change can be done with the display panel (SI-FD500) and setup support software (SI-H1).
          *3 (NPN model) The rating of non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current. (PNP model) The rating of voltage input: 10.2 V or more ON voltage (26.4 V max.) 0.6 mA or less OFFcurrent.
          *4 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
          • Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
          • Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
          devices. For details, refer to "Precautions on wiring".
          *5 The rating of the NPN open-collector: 50 mA max. (40 V max.), residual voltage of 0.5 V max. The rating of the PNP open collector: 50 mA max. (30 V max.), residual voltage of 0.5 V max.
          *6 When two or more expansion controllers are connected, the ambient temperature is 0 to +40 °C 32 to 104 °F.

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          Measurement Sensors