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          7. Sensor Head, Wafer Thickness Measurement Type

          Spectral-Interference Wafer Thickness MeterSI-F80R series

          Sensor Head, Wafer Thickness Measurement Type



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          Wafer thickness measurement type Sensor head

          Measurement range

          10 to 310 µm 0.000394" to 0.0122" (when n=3.5)*2

          Possible detection distance

          80 to 81.1 mm 3.15" to 3.19"

          Light source

          Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3)

          Spot diameter

          ø25 µm ø0.000984"*4


          ±0.1 µm ±0.000004" (when n=3.5)*5


          0.001 µm *6

          Sampling cycle

          200 µs

          LED display

          Target near center of measurement range : green lights. Target within measurement range : orange lights.
          Target outside measurement range : flashes orange.

          Temperature fluctuation

          Environmental resistance

          Enclosure rating


          Ambient light

          Incandescent lamp or Fluorescent lamp: 10,000 lux max.

          Ambient temperature

          0 to +50 °C 32 to 122 °F

          Relative humidity

          35 to 85 % RH (No condensation)

          Vibration resistance

          10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions




          Approx. 70 g (including cable)

          *1 The sensor head and spectrum unit are calibrated as a pair. They are not interchangeable.
          *2 Indicates the thickness measurement range when the refractive index is 3.5. (The thickness measurement range is 35 to 1100 µm0.001378" to 0.0433" when the refractive index is 1.)
          *3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
          *4 Indicates the minimum beam spot diameter within the measurement range.
          *5 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256, converted to a refractive index of 3.5.
          *6 This value is obtained by measuring a 0.3 mm 0.01" thick glass target within the possible detection distance with the number of averaging measurements set to 4096.

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          Measurement Sensors