High Power Digital Ultrasonic Sensors

Reliable detection of sweating wafers is ensured even in a vaporous atmosphere immediately after the slicing process.

Due to the colors and slits of the substrate, instability and chattering of outputs have been inevitable with conventional photoelectric sensors. The FW Series ensures reliable detection unaffected by colors and small slits.

Due to transparency and surface irregularities, detection with photoelectric sensors has been difficult. The FW Series ensures reliable detection unaffected by projections and depressions. In addition, the two outputs can be used for making outputs of upper and lower limits separately.

Detection has been difficult because of the minute height difference between the thin wafer and background. The FW Series ensures reliable detection by applying ultrasonic waves from an angle to cause slight reflections from the edge.

The FW Series is used to detect the remaining wafers. Detection with reflective-type sensors has been difficult because the light was absorbed by the surface film of the wafers. The FW Series is not affected by surface films or glossy backgrounds.

The FW Series is used for controlling the liquid level. The two outputs can be used for making outputs of upper and lower limits separately. In addition, the special liquid level detection mode enables various controls with simple setup.