Micro-head Spectral-interference Laser Displacement Meter

SI-F series

Catalogs View Catalog

Spectroscopy Unit, Not Subject to Export Control SI-F80U3

SI-F80U3 - Spectroscopy Unit, Not Subject to Export Control

  • CE Marking




Measurement range

0.05 to 1.1 mm 0.002" to 0.04" *1
(Possible detection distance : 80 to 81.1 mm 3.15" to 3.19")

Light source

Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2)

Spot diameter

ø20 µm ø0.000787"*3


±0.3 µm ±0.000012"*4


0.25 µm 0.00000984"*5

Sampling cycle

200 µs

Light source for guide

Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2)

LED display

Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange.

Temperature fluctuation

0.01% of F.S./°C

Environmental resistance

Ambient light

Incandescent lamp or Fluorescent lamp: 10,000 lux max.

Ambient temperature

0 to +35 °C 32 to 95 °F

Relative humidity

35 to 80 % RH (No condensation)

Vibration resistance

10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions




Approx. 1 kg

*1 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range.
*2 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
*3 Indicates the minimum beam spot diameter within the measurement range.
*4 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256.
*5 This value is obtained by measuring a glass plate surface located at the center of the measurement range with the number of averaging measurements set to 4,096.

Other Models