Measurement 5Reflective 2D Laser Displacement Sensor

Thickness is found by simultaneously measuring the base surface and target using a 2D laser displacement sensor and measuring step from the obtained profile.


Errors occur when there is a gap between the target and the reference surface.

  • 1. Use a base surface with high precision, such as a surface plate.
  • 2. Use vacuum contact or magnetic contact.

Improving mounting using the above steps will significantly improve measurement accuracy.

LJ-X Series
  • 2D Triangulation Method.
  • In-line Multi-point measurement.
  • World's Fastest sampling rate at 64,000 images/sec.
LJ-X Series
LT Series
  • Confocal Method
  • 2 µm spot diameter
  • Film thickness doesn't make sense to reference when talking about stroke.
LT Series

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