Half-cut wafer profile

Wafers are half cut in the dicing process to reduce chipping of the backsides. In doing this, cut depth control is important. The SI-F Series ø8-mm (ø0.31") sensor head can be installed in equipment to provide real-time feedback for cut depth, with a resolution of 0.01 µm.

Micro-head Spectral-interference Laser Displacement Meter

SI-F series

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