Spectral-Interference Wafer Thickness Meter

SI-F80R series

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Spectroscopy Unit SI-F80RU

SI-F80RU - Spectroscopy Unit

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

CAD Data

360°view (3D PDF)

  • CE Marking





Wafer Thickness Measurement Type Spectrum Unit

Measurement range

10 to 310 µm 0.000394" to 0.0122" (when n=3.5)*1

Possible detection distance

80 to 81.1 mm 3.15" to 3.19"

Light source

Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*2)

Spot diameter

ø25 µm*3


±0.1 µm ±0.000004" (when n=3.5)*4


0.001 µm *5

Sampling cycle

200 µs

LED display

Target near center of measurement range : green lights. Target within measurement range : orange lights.
Target outside measurement range : flashes orange.

Temperature fluctuation

0.01% of F.S./°C

Environmental resistance

Enclosure rating


Ambient light

Incandescent lamp or Fluorescent lamp: 10,000 lux max.

Ambient temperature

0 to +35 °C 32 to 95 °F

Relative humidity

35 to 80 % RH (No condensation)

Vibration resistance

10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions




Approx. 1.2 kg

*1 Indicates the thickness measurement range when the refractive index is 3.5. (The thickness measurement range is 35 to 1100 µm0.001378" to 0.0433" when the refractive index is 1.)
*2 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
*3 Indicates the minimum beam spot diameter within the measurement range.
*4 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256, converted to a refractive index of 3.5.
*5 This value is obtained by measuring a 0.3 mm thick glass target within the possible detecting distance with the number of averaging measurements set to 4,096.

Data Sheet (PDF) Other Models