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          Spectral-Interference Wafer Thickness MeterSI-F80R series

          Spectroscopy Unit



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          Wafer Thickness Measurement Type Spectrum Unit

          Measurement range

          10 to 310 µm 0.000394" to 0.0122" (when n=3.5)*1

          Possible detection distance

          80 to 81.1 mm 3.15" to 3.19"

          Light source

          Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*2)

          Spot diameter

          ø25 µm*3


          ±0.1 µm ±0.000004" (when n=3.5)*4


          0.001 µm *5

          Sampling cycle

          200 µs

          LED display

          Target near center of measurement range : green lights. Target within measurement range : orange lights.
          Target outside measurement range : flashes orange.

          Temperature fluctuation

          0.01% of F.S./°C

          Environmental resistance

          Enclosure rating


          Ambient light

          Incandescent lamp or Fluorescent lamp: 10,000 lux max.

          Ambient temperature

          0 to +35 °C 32 to 95 °F

          Relative humidity

          35 to 80 % RH (No condensation)

          Vibration resistance

          10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions




          Approx. 1.2 kg

          *1 Indicates the thickness measurement range when the refractive index is 3.5. (The thickness measurement range is 35 to 1100 µm0.001378" to 0.0433" when the refractive index is 1.)
          *2 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
          *3 Indicates the minimum beam spot diameter within the measurement range.
          *4 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256, converted to a refractive index of 3.5.
          *5 This value is obtained by measuring a 0.3 mm thick glass target within the possible detecting distance with the number of averaging measurements set to 4,096.

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          Measurement Sensors