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XY Measurement System VH-M100E

VH-M100E - XY Measurement System

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.




Load capacity

3 kg

Stage stroke distance

100 mm 3.94" in the X and Y directions, respectively

Display resolution

0.1 µm

Movement accuracy

4 + 0.02L (µm)*1


Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

50 VA

Environmental resistance

Ambient temperature

+5 to +40 °C 41 to 104 °F

Relative humidity

35 to 80 % RH (No condensation)


18 kg

*1 “L” means movement distance (mm).

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