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Large free-angle observation system (XYZ motorized) VHX-S660E

VHX-S660E - Large free-angle observation system (XYZ motorized)

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

  • CE Marking
  • CSA




XYθ stage

XY stage: Motorized/Manual


XY-stage movement range

±50 mm ±1.97"

XYθ stage size

Top surface: 233 × 185 mm 9.17" × 7.28" (Center disc: ø168 ø6.61")

Transmitted lighting


Z stage

Z stage: Motorized/Manual


Z-motorized stage motor

5-phase stepping motor

Z-motorized stage travel speed

17 mm 0.67"/sec (max)

Z-stage movement range

49 mm 1.93"

Load capacity

5 kg

XYθ stage

XY-motorized stage motor

2-phase stepping motor

XY-motorized stage resolution

1 µm (typ.)

XY-motorized stage movement speed

20 mm 0.79"/sec (max.)

Z stage

Z-motorized stage resolution

0.1 µm (typ.)

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

60 VA

Environmental resistance

Ambient temperature

+5 to +40 °C 41 to 104 °F

Relative humidity

35 to 80 % RH (No condensation)


Approx. 20 kg

Data Sheet (PDF) Other Models