3D Laser Scanning Confocal Microscope

VK-X series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Recommended Replaceable Products: Measurement head - VK-X3050

Measurement head: Red semiconductor laser VK-X1050

VK-X1050 - Measurement head: Red semiconductor laser

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Specifications

Model			VK-X1050
Type			Head unit
Total magnification			Up to 28,800 x^*1
Field of view (minimum range)			11 µm to 7,398 µm
Frame rate (laser measurement speed)			4 to 125 Hz, 7,900 Hz^*2
Measurement principle	Optical system		Pinhole confocal optical system, Focus variation
	Light-receiving element		16-bit photomultiplier: High-definition color CMOS
	Scanning method (during general measurement and image stitching)		Automatic upper/lower limit setting, high-speed light intensity optimization (AAGII) , poor reflected light intensity supplement (Double Scan)
Height measurement	Display resolution		5 nm
	Linear scale
	Dynamic range		16 bits
	Repeatability σ	Laser confocal	20 x: 40 nm, 50 x: 20 nm
		Focus variation	5 x: 500 nm, 10 x: 100 nm, 20 x: 50 nm, 50 x: 30 nm
	Height data acquisition range		700,000 steps
	Accuracy		0.2 + L /100 µm or less (L = Measuring length)^*3
Width measurement	Display resolution		10 nm
	Repeatability 3σ	Laser confocal	20 x: 100 nm, 50 x: 50 nm
		Focus variation	5 x: 400 nm, 10 x: 400 nm, 20 x: 120 nm, 50 x: 65 nm
	Accuracy		Measured value ±2 % or less^*3
XY stage configuration	Manual: Operating range		70 mm x 70 mm 2.76" x 2.76"
	Motorized: Operating range		100 mm x 100 mm 3.94" x 3.94"
Observation	Observation image		High-resolution color CMOS image 16-bit laser color confocal image Confocal + ND filter optical system C-laser differential interference image
	Lighting		Ring illumination, coaxial illumination
Measurement laser light source	Wavelength		Red semiconductor laser, 661 nm
	Maximum output		1 mW
	Laser class		Class 2 laser product (IEC60825-1, FDA (CDRH) Part 1040.10^*4)
Power supply	Power voltage		100 to 240 VAC, 50/60 Hz
	Power consumption		150 VA
Weight			Approx. 13.0 kg
^1 When using a 23 inch full-screen display. ^2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan has a measurement pitch that is within 0.1 µm. ^3 When measuring a standard sample (standard scale) with a 20 x or greater lens. ^4 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.

Data Sheet (PDF) Other Models