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          7. Measurement head: Red semiconductor laser

          3D Laser Scanning Confocal MicroscopeVK-X series

          Measurement head: Red semiconductor laser



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          Head unit

          Total magnification

          Up to 28,800 x*1

          Field of view (minimum range)

          11 µm to 7,398 µm

          Frame rate (laser measurement speed)

          4 to 125 Hz, 7,900 Hz*2

          Measurement principle

          Optical system

          Pinhole confocal optical system, Focus variation

          Light-receiving element

          16-bit photomultiplier: High-definition color CMOS

          Scanning method (during general measurement and image stitching)

          Automatic upper/lower limit setting, high-speed light intensity optimization (AAGII) , poor reflected light intensity supplement (Double Scan)

          Height measurement

          Display resolution

          5 nm

          Linear scale

          Dynamic range

          16 bits

          Repeatability σ

          Laser confocal

          20 x: 40 nm, 50 x: 20 nm

          Focus variation

          5 x: 500 nm, 10 x: 100 nm, 20 x: 50 nm, 50 x: 30 nm

          Height data acquisition range

          700,000 steps


          0.2 + L /100 µm or less (L = Measuring length)*3

          Width measurement

          Display resolution

          10 nm

          Repeatability 3σ

          Laser confocal

          20 x: 100 nm, 50 x: 50 nm

          Focus variation

          5 x: 400 nm, 10 x: 400 nm, 20 x: 120 nm, 50 x: 65 nm


          Measured value ±2 % or less*3

          XY stage configuration

          Manual: Operating range

          70 mm x 70 mm 2.76" x 2.76"

          Motorized: Operating range

          100 mm x 100 mm 3.94" x 3.94"


          Observation image

          High-resolution color CMOS image 16-bit laser color confocal image Confocal + ND filter optical system C-laser differential interference image


          Ring illumination, coaxial illumination

          Measurement laser light source


          Red semiconductor laser, 661 nm

          Maximum output

          1 mW

          Laser class

          Class 2 laser product (IEC60825-1, FDA (CDRH) Part 1040.10*4)

          Power supply

          Power voltage

          100 to 240 VAC, 50/60 Hz

          Power consumption

          150 VA


          Approx. 13.0 kg

          *1 When using a 23 inch full-screen display.
          *2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan has a measurement pitch that is within 0.1 µm.
          *3 When measuring a standard sample (standard scale) with a 20 x or greater lens.
          *4 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.

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          Microscopes / 3D Surface Profilers