Thickness measurement of transparent films
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Thickness can be measured in process
- Benefit
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Small sensor heads can be places at several locations and the measurements are automatically synchonized
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- SI-F series
Micro-head Spectral-interference Laser Displacement Meter -
Introducing the world’s first micro-head, with the highest measurement accuracy in its class and a level of performance that was previously thought impossible.
- SI-F series
- SI-F80R series
Spectral-Interference Wafer Thickness Meter -
With the adoption of the near-infrared SLD, thickness measurement for the wafer alone is possible even while BG tape is affixed. Even when there is strong pattern-based variation on the surface of the wafer, accurate in-line measurement is possible.
- SI-F80R series
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