Thickness measurement of transparent films

Thickness measurement of transparent films

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Thickness can be measured in process

Benefit

Small sensor heads can be places at several locations and the measurements are automatically synchonized

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  • SI-F series - Micro-head Spectral-interference Laser Displacement Meter

    SI-F series
    Micro-head Spectral-interference Laser Displacement Meter

    Introducing the world’s first micro-head, with the highest measurement accuracy in its class and a level of performance that was previously thought impossible.

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  • SI-F80R series - Spectral-Interference Wafer Thickness Meter

    SI-F80R series
    Spectral-Interference Wafer Thickness Meter

    With the adoption of the near-infrared SLD, thickness measurement for the wafer alone is possible even while BG tape is affixed. Even when there is strong pattern-based variation on the surface of the wafer, accurate in-line measurement is possible.

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