Thickness measurement of transparent web
High accuracy measuring coating thickness of films
Nanometer resolution can be used to measure thickness without contacting the target
- Benefit
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High accuracy, can be measured 5um thickness and can be measured multi layered film.
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- SI-F series
Micro-head Spectral-interference Laser Displacement Meter -
Introducing the world’s first micro-head, with the highest measurement accuracy in its class and a level of performance that was previously thought impossible.
- SI-F series
- SI-F80R series
Spectral-Interference Wafer Thickness Meter -
With the adoption of the near-infrared SLD, thickness measurement for the wafer alone is possible even while BG tape is affixed. Even when there is strong pattern-based variation on the surface of the wafer, accurate in-line measurement is possible.
- SI-F80R series
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