3D Interference Measurement Sensor

WI-5000 series

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3D Interference Measurement Sensor WI-5000 series

3D Surface Measurements in Just .13 Seconds

WI-5000 series - 3D Interference Measurement Sensor

The WI-5000 Series 3D interference measurement sensors capture a 3D image of target areas of up to 10 x 10 mm (0.39″ × 0.39″) in just 0.13 seconds. The sensor records 80,000 height data points across the surface simultaneously to perform high-accuracy measurements of height, coplanarity, and even surface roughness (Sa and Sz). By utilizing white light interferometry to capture images, the sensor can employ coaxial surface measurement, eliminating dead zones that prevent accurate measurement in grooves and other shapes with sharp height changes. The measurement principle enables accurate, repeatable 3D measurements on nearly any surface type, including transparent or mirrored targets. While its speed makes it ideal for inline measurements, an adjustable stand is also available, allowing users to capitalize on the same quick, automatic measurements for both inline and offline inspections.


Area Measurement, Not Point or Line Measurement

Instantly measure 80000 points over a maximum measurement area of 10 × 10 mm 0.39" × 0.39". Utilizing the principles of white light interferometry, the WI-5000 Series is not affected by material type, color, or blind spots, allowing for high-accuracy, micron-level measurement.

100% Inline Measurement at High Speeds

In order to measure multiple points, the sensor must scan the target quickly and accurately. Doing so requires the stage to be moved, which makes inspection extremely time-consuming. With the WI-5000 Series, measurement is performed over a surface, significantly reducing measurement time and enabling 100% inspection.

Streamlined Offline Inspection for Significantly Reduced Labor Times

A dedicated stand to secure the sensor head is available for offline inspections. Various other functions were specifically designed for significant reductions in labor times. From simple measurement to data storage, the WI-5000 Series improves work efficiency in a variety of settings.