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          4. Spectral Interference Displacement Sensor
          5. Micro-head Spectral-interference Laser Displacement Meter
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          7. Spectroscopy Unit

          Micro-head Spectral-interference Laser Displacement MeterSI-F series

          Spectroscopy Unit



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          Thickness measurement type Spectrum unit

          Measurement range

          0.05 to 1.1 mm 0.002" to 0.04" *1
          (Possible detection distance : 80 to 81.1 mm 3.15" to 3.19")

          Light source

          Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2)

          Spot diameter

          ø20 µm ø0.000787"*3


          ±0.2 µm ±0.000008" *4


          0.001 µm *5

          Sampling cycle

          200 µs

          Light source for guide

          Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2)

          LED display

          Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange.

          Temperature fluctuation

          0.01% of F.S./°C

          Environmental resistance

          Enclosure rating


          Ambient light

          Incandescent lamp or Fluorescent lamp: 10,000 lux max.

          Ambient temperature

          0 to +35 °C 32 to 95 °F

          Relative humidity

          35 to 80 % RH (No condensation)

          Vibration resistance

          10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions




          Approx. 1 kg

          *1 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range.
          *2 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
          *3 Indicates the minimum beam spot diameter within the measurement range.
          *4 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256.
          *5 This value is obtained by measuring a 0.3 mm 0.01" thick glass target within the possible detection distance with the number of averaging measurements set to 4,096.

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          Measurement Sensors