Spectral-Interference Wafer Thickness Meter

SI-F80R series

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Head Extension Unit, Not Subject to Export Control SI-FA103

SI-FA103 - Head Extension Unit, Not Subject to Export Control

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)


CAD Data

360°view (3D PDF)


  • CE Marking




Separate type


Expansion controller*1

No. of connectable spectrum units



Minimum display unit


Display range

Display cycle

Terminal block

Laser remote interlock input


TIMING1 input

RESET1 input

Auto-zero1 input

Laser control input

Analog voltage output

±10 V x 1 outputs, Output impedance: 100 Ω*2

Analog current output

4 to 20 mA x 1 output, Maximum load resistance: 350 Ω*2

Alarm output


General comparator output

Expansion connector

TIMING2 input

RESET input

Auto-zero input

Program switch input

Alarm output

Comparator/ binary output

Binary output

Strobe output

Binary selection output

Binary selection input

RS-232C interface


USB interface

Ethernet interface

Major functions

12 Out simultaneous measurement
calculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
interferometer mode, mask, connection of setting support software, etc.

Environmental resistance

Ambient temperature

0 to +50 °C 32 to 122 °F*3

Relative humidity

35 to 85 % RH (No condensation)

Vibration resistance

10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions


Approx. 300 g

*1 Up to four expansion controllers can be connected to the main controller.
*2 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
• Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
• Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
devices. For details, refer to "Precautions on wiring".
*3 When two or more expansion controllers are connected, the ambient temperature is 0 to +40 °C 32 to 104 °F.

Data Sheet (PDF) Other Models