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          Spectral-Interference Wafer Thickness MeterSI-F80R series

          Head Extension Unit, Not Subject to Export Control



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          Separate type


          Expansion controller*1

          No. of connectable spectrum units



          Minimum display unit


          Display range

          Display cycle

          Terminal block

          Laser remote interlock input


          TIMING1 input

          RESET1 input

          Auto-zero1 input

          Laser control input

          Analog voltage output

          ±10 V x 1 outputs, Output impedance: 100 Ω*2

          Analog current output

          4 to 20 mA x 1 output, Maximum load resistance: 350 Ω*2

          Alarm output


          General comparator output

          Expansion connector

          TIMING2 input

          RESET input

          Auto-zero input

          Program switch input

          Alarm output

          Comparator/ binary output

          Binary output

          Strobe output

          Binary selection output

          Binary selection input

          RS-232C interface


          USB interface

          Ethernet interface

          Major functions

          12 Out simultaneous measurement
          calculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
          interferometer mode, mask, connection of setting support software, etc.

          Environmental resistance

          Ambient temperature

          0 to +50 °C 32 to 122 °F*3

          Relative humidity

          35 to 85 % RH (No condensation)

          Vibration resistance

          10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions


          Approx. 300 g

          *1 Up to four expansion controllers can be connected to the main controller.
          *2 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
          • Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
          • Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
          devices. For details, refer to "Precautions on wiring".
          *3 When two or more expansion controllers are connected, the ambient temperature is 0 to +40 °C 32 to 104 °F.

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          Measurement Sensors