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3D Surface ProfilerVK-X3000 series

Controller

VK-X3000

SPECIFICATIONS

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Model

VK-X3000

Type

Controller

Total magnification

42 to 28800×*1

Field of view

11 to 7398 μm

Measurement principle

Laser confocal, Focus variation, White light interferometry, Spectral interference

Laser wavelength

VK-X3100: Semiconductor laser, 404 nm
VK-X3050: Semiconductor laser, 661 nm

Max. laser measurement speed

Surface: 125 Hz, Line: 7900 Hz*2

Max. laser output

0.9 mW

Laser class

Class 2 (IEC60825-1, FDA (CDRH) Part 1040.10*3)

Laser light-receiving element

16-bit photomultiplier

White light source

White LED

White-light-receiving element

High-definition color CMOS

Laser confocal

Height display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Height repeatability σ

VK-X3100: 10×: 100 nm, 20×: 40 nm, 50×: 12 nm
VK-X3050: 10×: 100 nm, 20×: 40 nm, 50×: 20 nm

Height accuracy

0.2+L/ 100 μm or less*4

Width display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Width repeatability 3σ

VK-X3100: 10×: 200 nm, 20×: 100 nm, 50×: 40 nm
VK-X3050: 10×: 400 nm, 20×: 100 nm, 50×: 50 nm

Width accuracy

Measured value ±2% or less*4

Focus variation

Height display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Height repeatability σ

VK-X3100: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm
VK-X3050: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm

Height accuracy

0.2+L/ 100 μm or less*4

Width display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Width repeatability 3σ

VK-X3100: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm
VK-X3050: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm

Width accuracy

Measured value ±2% or less*4

White light interferometry

Height display resolution

0.01 nm

Width display resolution

0.1 nm

Surface topography repeatability

0.08 nm*5

Repeatability of RMS

0.008 nm*5

Spectral interference film thickness measurement

Repeatability σ

0.1 nm*5

Accuracy

±0.6%*5

Optical observation

Number of pixels

5.6 million

Revolver

6-hole electric revolver

Ring illumination lens

2.5×, 5×, 10×

Optical zoom

1 to 8×

XY stage configuration

Manual operation range

70 × 70 mm 2.76” × 2.76”

Motorized operation range

100 × 100 mm 3.94” × 3.94”

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature

+15 to 28°C 59 to 82.4°F

Relative humidity

20 to 80% RH (No condensation)

Weight

Approx. 3 kg

*1 When using a 23-inch full-screen display.
*2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan measurement pitch is within 0.1 μm.
*3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
*4 When measuring a standard sample with a 20× or greater lens.
*5 Typical values under the default measurement environment.

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