3D Laser Scanning Confocal Microscope

VK-X series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Recommended Replaceable Products: Controller - VK-X3000

Controller VK-X250K

VK-X250K - Controller

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

  • CE Marking
  • CSA




Total magnification

Up to 28000×*1

Field of view (minimum range)

11 µm to 5400 µm

Frame rate

Laser measurement speed

4 to 120 Hz, 7900 Hz*2

Measurement principles

Optical system

Pinhole confocal optical system

Light receiving element

16-bit photomultiplier

Scanning method (during general measurement and image stitching)

Automatic upper/lower limit setting, high-speed light intensity optimization (AAGII),
poor reflected light intensity supplement (Double Scan)

Height measurement

Display resolution

0.5 nm

Linear scale

Dynamic range

16 bits

Repeatability σ

20× 40 nm , 50× 12 nm ,
150× 12 nm *3

Memory for Z-axis measurement

14 million steps


0.2+L/100 µm or less (L=Measuring Length)*3

Z stage configuration


Base with separate measuring head

Maximum sample height

28 mm 1.102", 128 mm 5.039" (option)

Width measurement

Display resolution

1 nm

Repeatability 3σ

20× 100 nm, 50× 40 nm ,
150× 20 nm *3



XY stage configuration

Manual: Operating range

70 mm×70 mm 2.76" × 2.76"

Motorized: Operating range

50 mm × 50 mm 1.97" × 1.97" 100 mm × 100 mm 3.94" × 3.94"*4


Observation image

Super-high-resolution color CCD image
16-bit laser color confocal image
Confocal + ND filter optical system
C-laser differential interference image

Maximum capture resolution


Measurement laser light source


Violet laser, 408 nm

Maximum output

0.95 mW

Laser Class

Class 2 laser product (IEC60825-1)


Microscope unit

Approx. 26 kg (sensor head detached: approx. 10 kg)


Approx. 11 kg

*1 For 23-inch monitors.
*2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan has a measurement pitch that is within 0.1 µm.
*3 When measuring a standard sample (standard scale) with a 20× or greater lens at an ambient temperature of 20 ± 2°C 68 ± 3.6°F. However, does not apply to the VK-X120/130 with a 100× lens.
*4 When a motorized stage is mounted.

Data Sheet (PDF) Other Models